Jason Garcheung Fung
Applied Materials
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Publication
Featured researches published by Jason Garcheung Fung.
advanced semiconductor manufacturing conference | 2010
Gregory E. Menk; Sivakumar Dhandapani; Charles C. Garretson; Shou-sung Chang; Jason Garcheung Fung; Stan D. Tsai
A new pad conditioning arm design enables the use of closed-loop control (CLC) to improve conditioning performance throughout the life of a pad and disk pair. Measured pad conditioner torque is used to monitor and control the conditioning and polish processes in situ and in real time. The CLC system maintains process performance throughout pad life by adjusting the conditioner down force to compensate for process drift, such as the loss of diamond aggressiveness as the disk ages.
Archive | 2011
Sivakumar Dhandapani; Jun Qian; Christopher D. Cocca; Jason Garcheung Fung; Shou-sung Chang; Charles C. Garretson; Gregory E. Menk; Stan D. Tsai
Archive | 2009
Sivakumar Dhandapani; Stan D. Tsai; Daxin Mao; Sameer Deshpande; Shou-sung Chang; Gregory E. Menk; Charles C. Garretson; Jason Garcheung Fung; Christopher D. Cocca; Hung Chih Chen
Archive | 2011
Gregory E. Menk; Stan D. Tsai; Sang J. Cho; Slvakumar Dhandapani; Christopher D. Cocca; Jason Garcheung Fung; Shou-sung Chang; Charles C. Garretson
Archive | 2011
Sivakumar Dhandapani; Gregory E. Menk; Sang J. Cho; Jason Garcheung Fung; Christopher D. Cocca; Stan D. Tsai; Shou-sung Chang; Charles C. Garretson
Archive | 2014
Hung Chen; Shou-sung Chang; Jason Garcheung Fung; Matthew A. Gallelli; Paul D. Butterfield; Kevin Chou
Archive | 2013
Hung Chih Chen; Thomas H. Osterheld; Charles C. Garretson; Jason Garcheung Fung
ECS Journal of Solid State Science and Technology | 2016
Kun Xu; Shih-Haur Shen; Jason Garcheung Fung; Hassan G. Iravani; Ingemar Carlsson; Tzu-Yu Liu; Bogdan Swedek; Shou-sung Chang; Wen-chiang Tu; Tomohiko Kitajima; Katrina Mikhaylich; Brian J. Brown; Sidney P. Huey; Fritz Redeker
Archive | 2015
Jason Garcheung Fung; Rajeev Bajaj; Kasiraman Krishnan; Mahendra C. Orilall; Fred C. Redeker; Russell Edward Perry; Gregory E. Menk; Daniel Redfield
Archive | 2015
Rajeev Bajaj; Daniel Redfield; Mahendra C. Orilall; Boyi Fu; Aniruddh Khanna; Jason Garcheung Fung; Mario Cornejo; Ashwin Chockalingam; Mayu Yamamura; Veera Raghava Reddy Kakireddy; Ashavani Kumar; Venkatachalam Hariharan; Gregory E. Menk; Fred C. Redeker; Nag B. Patibandla; Hou T. Ng; Robert E. Davenport; Amritanshu Sinha
