J.M. Shin

Highly manufacturable high density phase change memory of 64Mb and beyond

Highly manufacturable 64Mbit PRAM has been successfully fabricated using N-doped Ge/sub 2/Sb/sub 2/Te/sub 5/ (GST) and optimal GST etching process. Using those technologies, it was possible to achieve the low writing current of 0.6 mA and clear separation between SET and RESET resistance distributions. The 64Mb PRAM was designed to support commercial NOR flash memory compatible interfaces. Therefore, the fabricated chip was tested under the mobile application platform and its functionality and reliability has been evaluated by operation temperature dependency, disturbance, endurance, and retention. Finally, it was clearly demonstrated that high density PRAM can be fabricated in the product level with strong reliability to produce new nonvolatile memory markets.

A 20nm 1.8V 8Gb PRAM with 40MB/s program bandwidth

Phase-change random access memory (PRAM) is considered as one of the most promising candidates for future memories because of its good scalability and cost-effectiveness [1]. Besides implementations with standard interfaces like NOR flash or LPDDR2-NVM, application-oriented approaches using PRAM as main-memory or storage-class memory have been researched [2-3]. These studies suggest that noticeable merits can be achieved by using PRAM in improving power consumption, system cost, etc. However, relatively low chip density and insufficient write bandwidth of PRAMs are obstacles to better system performance. In this paper, we present an 8Gb PRAM with 40MB/s write bandwidth featuring 8Mb sub-array core architecture with 20nm diode-switched PRAM cells [4]. When an external high voltage is applied, the write bandwidth can be extended as high as 133MB/s.

Full Integration of Highly Manufacturable 512Mb PRAM based on 90nm Technology

Fully functional 512Mb PRAM with 0.047mum2 (5.8F2) cell size was successfully fabricated using 90nm diode technology in which the authors developed novel process schemes such as vertical diode as cell switch, self-aligned bottom electrode contact scheme, and line-type Ge2Sb2Te5. The 512Mb PRAM showed excellent electrical properties of sufficiently large on-current and stable phase transition behavior. The reliability of the 512Mb chip was also evaluated as a write-endurance over 1E5 cycles and a data retention time over 10 years at 85degC

Highly reliable 50nm contact cell technology for 256Mb PRAM

Novel small contact fabrication technologies were proposed to realize reliable high density 256Mb PRAM(phase change memory) product. Introducing the 2-step CMP (chemical mechanical polishing) process and the ring-shaped contact structure, the contact area distribution was greatly improved even at the smallest contact diameter of 50nm node. The validity of this approach was directly confirmed by the evaluation of the functionality for the fabricated 256Mbit PRAM based on 0.10/spl mu/m CMOS technology.

Highly Reliable 256Mb PRAM with Advanced Ring Contact Technology and Novel Encapsulating Technology

Advanced ring type technology and encapsulating scheme were developed to fabricate highly manufacturable and reliable 256Mb PRAM. Very uniform BEC area was prepared by the advanced ring type technology in which core dielectrics were optimized for cell contact CMP process. In addition, relatively high set resistance was stabilized from encapsulating Ge2Sb2Te5 (GST) stack with blocking layers, thus giving rise to a wide sensing window. These advanced ring type and encapsulating technologies can provide great potentials of developing high density 512Mb PRAM and beyond

A 58nm 1.8V 1Gb PRAM with 6.4MB/s program BW

In mobile systems, the demand for the energy saving continues to require a low power memory sub-system. During the last decade, the floating-gate flash memory has been an indispensable low power memory solution. However, NOR flash memory has begun to show difficulties in scaling due to the devices reliability and yield issues. Over the past few years, phase-change random access memory (PRAM) has emerged as an alternative non-volatile memory (NVM) owing to its promising scalability and low cost process [1,2]. In this paper, a PRAM, implemented in a 58nm PRAM process with a low power double-data-rate nonvolatile memory (LPDDR2-N) interface, is presented [3].

Novel Heat Dissipating Cell Scheme for Improving a Reset Distribution in a 512M Phase-change Random Access Memory (PRAM)

Programming with larger current than optimized one is often preferable to ensure a good resistance distribution of high-resistive reset state in high-density phase-change random access memories because it is very effective to increase the resistance of cells to a target value. In this paper, we firstly report that this larger current writing may conversely degrade the reset distribution by reducing the resistance of normal cells via the partial crystallization of amorphous Ge2Sb2Te5 and this degradation can be suppressed by designing a novel cell structure with a heat dissipating layer.

1.2V 1.6Gb/s 56nm 6F 2 4Gb DDR3 SDRAM with hybrid-I/O sense amplifier and segmented sub-array architecture

As the workload and speed of a computer system increase, both the data bandwidth and capacity of main memory inevitably need to grow. However, the number of slots per channel is limited to maintain high bandwidth, making the capacity requirement difficult to meet. Another problem is that computer systems impose a limit on the supply of power since their power dissipation increases rapidly, where main memories account for roughly 15% of total power consumption. To address these issues, we design a 4Gb DDR3 SDRAM that supports a 1.2V supply voltage and 1.6Gb/s data rate.

A new reference signal generation method for MRAM using a 90-degree rotated MTJ

A new reference signal generation method for high-density MRAM is reported. 0.4/spl times/0.8 /spl mu/m/sup 2/ magnetic tunnel junction (MTJ) elements were successfully integrated with 0.24-/spl mu/m CMOS technology. By using a 90-degree rotated MTJ as a new reference signal generator, the reference resistance could be always located in the exact midpoint between high-resistance state R/sub H/ and low-resistance state R/sub L/ regardless of applied voltage. When tested in 8/spl times/8 MTJ arrays, it is found to show good fidelity to our expectations. So it is supposed that this new method is more favorable for high-density MRAM.

Full Integration of Highly Reliable Phase Change Memory With Advanced Ring Type Bottom Electrode Contact

ABSTRACT We successfully developed 256Mb Phase Change Random Access Memory (PRAM) based on 0.10μ m-CMOS technologies using ring type contact. The writing current with uniform CD process variation of Bottom Electrode Contact (BEC) was achieved by improving CMP process and developing core dielectric material. Also, the ring type contact scheme provided strong reliability such as the cycling endurance and data retention time for 256 Mb high density PRAM.