Jagan Rangarajan | Researchain

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Featured researches published by Jagan Rangarajan.

Archive | 2009

Polishing system having a track

Alpay Yilmaz; Allen L. D'Ambra; Jagan Rangarajan; Lakshmanan Karuppiah

Archive | 2009

METHODS OF VERIFYING EFFECTIVENESS OF A PUT OF A SUBSTRATE ONTO A SUBSTRATE SUPPORT

Douglas Macleod; Dhruv Gajaria; Jagan Rangarajan

Archive | 2009

METHOD AND APPARATUS FOR LINEAR PAD CONDITIONING

Alpay Yilmaz; Edward Golubovsky; Jagan Rangarajan

Archive | 2009

END EFFECTOR FOR A CLUSTER TOOL

Jeffrey C. Hudgens; Jagan Rangarajan; Michael R. Rice; Penchala N. Kankanala

Archive | 2012

Circular track actuator system

Jagan Rangarajan; Alpay Yilmaz

Archive | 2011

Apparatus for chemical mechanical polishing

Jagan Rangarajan; Alpay Yilmaz

Archive | 2013

Polishing System with In-Sequence Sensor

Jeffrey Drue David; Boguslaw A. Swedek; Doyle E. Bennett; Thomas H. Osterheld; Benjamin Cherian; Dominic J. Benvegnu; Harry Q. Lee; Allen L. D Ambra; Jagan Rangarajan

Archive | 2012

Carrier Head Sweep Motor Current for In-Situ Monitoring

Jagan Rangarajan; Alpay Yilmaz

Archive | 2011

Chemical mechanical polishing platform architecture

Jagan Rangarajan; Alpay Yilmaz

Archive | 2013

Multi-Platen Multi-Head Polishing Architecture

Jeffrey Drue David; Boguslaw A. Swedek; Doyle E. Bennett; Thomas H. Osterheld; Benjamin Cherian; Dominic J. Benvegnu; Harry Q. Lee; Allen L. D'Ambra; Jagan Rangarajan

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