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John M. Delarios

Lam Research

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Publication

Featured researches published by John M. Delarios.

Archive | 1992

Organic preclean for improving vapor phase wafer etch uniformity

Michael A. Mcneilly; John M. Delarios; Glenn L. Nobinger; Wilbur C. Krusell; Dah-Bin Kao; Ralph K. Manriquez; Chiko Fan

Archive | 1999

Apparatus for cleaning edges of contaminated substrates

Mansour Moinpour; Hoang T. Nguyen; Mohsen Salek; Young C. Park; Tom Bramblett; John M. Delarios; Lynn Ryle; Don E. Anderson; Wilbur C. Krusell

Archive | 2006

ENHANCED WAFER CLEANING METHOD

Seokmin Yun; John M. Boyd; Mark Wilcoxson; John M. Delarios

Archive | 2002

Drying a substrate using a combination of substrate processing technologies

Michael Ravkin; Katrina Mikhaylichenko; John M. Delarios

Archive | 2005

Method for removing material from semiconductor wafer and apparatus for performing the same

Mikhail Korolik; Michael Ravkin; John M. Delarios; Fritz C. Redeker; John M. Boyd

Archive | 1996

Method and apparatus for chemical delivery through the brush

John M. Delarios; Mikhail Ravkin; Douglas G. Gardner

Archive | 2006

Method and apparatus for cleaning a semiconductor substrate

Erik M. Freer; John M. Delarios; Katrina Mikhaylichenko; Michael Ravkin; Mikhail Korolik; Fred C. Redeker

Archive | 2004

Proximity head heating method and apparatus

Katrina Mikhaylichenko; John M. Delarios

Archive | 2005

System and method for a combined contact and non-contact wafer cleaning module

Katrina Mikhaylichenko; Michael Ravkin; John M. Delarios

Archive | 2009

Method of dielectric film treatment

Seokmin Yun; Ji Zhu; John M. Delarios; Mark Wilcoxson

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Collaboration

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Michael Ravkin

Lam Research

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Katrina Mikhaylichenko

Lam Research

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Mikhail Korolik

Lam Research

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Erik M. Freer

Lam Research

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Fritz C. Redeker

Lam Research

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Mikhail Ravkin

Lam Research

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Douglas G. Gardner

Lam Research

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Fred C. Redeker

Lam Research

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John M. Boyd

Lam Research

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Seokmin Yun

Lam Research

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