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Seokmin Yun

Lam Research

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Publication

Featured researches published by Seokmin Yun.

Archive | 2004

Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition

Seokmin Yun; Ji Zhu; Peter Cirigliano; Sangheon Lee; Thomas S. Choi; Peter Loewenhardt; Mark Wilcoxson; Reza Sadjadi; Eric Hudson; James V. Tietz

Archive | 2006

ENHANCED WAFER CLEANING METHOD

Seokmin Yun; John M. Boyd; Mark Wilcoxson; John M. Delarios

Archive | 2009

Method of dielectric film treatment

Seokmin Yun; Ji Zhu; John M. Delarios; Mark Wilcoxson

Archive | 2006

Post etch wafer surface cleaning with liquid meniscus

Ji Zhu; Seokmin Yun; Mark Wilcoxson; John M. de Larios

Archive | 2011

Method for reducing pattern collapse in high aspect ratio nanostructures

Amir Yasseri; Ji Zhu; Seokmin Yun; David Mui; Katrina Mikhaylichenko

Archive | 2012

Method of post etch polymer residue removal

Seokmin Yun; Mark Wilcoxson; Ji Zhu; Kevin Chuang; Hsiao Wei Chang; David Lou

Archive | 2011

Method and apparatus for drying a semiconductor wafer

Seokmin Yun; Hancheol Kwon; Gerhard Wulz; Frederic Kovacs

Archive | 2008

Method of preventing pattern collapse during rinsing and drying

Seokmin Yun; John M. Delarios

Archive | 2007

Method of low-k dielectric film repair

Seokmin Yun; Mark Wilcoxson; John M. de Larios

Archive | 2005

Substrate preparation using megasonic coupling fluid meniscus and methods, apparatus, and systems for implementing the same

John M. Boyd; Fritz C. Redeker; Seokmin Yun

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Collaboration

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Mark Wilcoxson

Lam Research

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Ji Zhu

Lam Research

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John M. Boyd

Lam Research

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John M. Delarios

Lam Research

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John M. de Larios

Lam Research

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Fritz C. Redeker

Lam Research

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Larios John M. De

Lam Research

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Amir Yasseri

Lam Research

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David Lou

Lam Research

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David Mui

Lam Research

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