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Julian Kaller

Carl Zeiss AG

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Publication

Featured researches published by Julian Kaller.

Archive | 2014

Microlithography projection objective

Heiko Feldmann; Daniel Kraehmer; Jean-Claude Perrin; Julian Kaller; Aurelian Dodoc; Vladimir Kamenov; Olaf Conradi; Toralf Gruner; Thomas Okon; Alexander Epple

Archive | 2010

Cleaning module and euv lithography device with cleaning module

Dirk Heinrich Ehm; Julian Kaller; Stefan Schmidt; Dieter Kraus; Stefan Wiesner; Almut Czap; Hin-Yiu Anthony Chung; Stefan Koehler

Archive | 2006

Devices and methods for inspecting optical elements with a view to contamination

Julian Kaller; Herbert Fink; Christoph Zaczek; Wolfgang Rupp

Archive | 2005

Optical element unit for exposure processes

Bernhard Gellrich; Jens Kugler; Guido Limbach; Julian Kaller; Hans Jürgen Scherle; Dieter Schmerek; Detlev Müller; Thomas Schletterer

Archive | 2012

Substrates for mirrors for euv lithography and their production

Julian Kaller; Wilfried Clauss; Michael Gerhard

Archive | 2012

Lens module comprising at least one exchangeable optical element

Guido Soyez; Stephan Back; Joachim Buechele; Julian Kaller; Guido Limbach; Harald Woelfle

Archive | 2005

Decontaminating optical element surface, especially in projection illumination plant for microlithography, using cleaning device applying activated reducing gas to the surface under atmospheric pressure

Herbert Fink; Julian Kaller

Archive | 2006

Optical system i.e. projection lens, for use in microlithography, has housing including two individual housing parts provided with optical unit, where flushing gas e.g. neon, flows via inlet opening into housing

Stephan Back; Cornelia Bühler; Julian Kaller; Alexander Kohl; Thomas Petasch; Johannes Rau

Archive | 2009

Cleaning module, particularly for extreme-ultraviolet lithography apparatus, has supply for molecular hydrogen, where atomic hydrogen generating device is provided

Dirk Heinrich Dr. Ehm; Julian Kaller

Archive | 2007

Optical arrangement used in microlithography comprises photomask and adsorbing substance arranged in intermediate chamber to bind contaminating gases containing hydrocarbons by physical adsorption and/or chemical adsorption

Julian Kaller

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Collaboration

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Guido Limbach

Carl Zeiss AG

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Toralf Gruner

Carl Zeiss AG

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Michael Gerhard

Carl Zeiss AG

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Stephan Back

Carl Zeiss AG

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Wilfried Clauss

Carl Zeiss AG

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Alexander Epple

Carl Zeiss AG

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Bernhard Gellrich

Carl Zeiss AG

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Daniel Kraehmer

Carl Zeiss AG

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Dirk Heinrich Dr. Ehm

Carl Zeiss AG

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Franz Sorg

Carl Zeiss AG

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