Kazuhiro Tomioka
Toshiba
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Publication
Featured researches published by Kazuhiro Tomioka.
international symposium on semiconductor manufacturing | 1998
Hidetoshi Koike; Fumitomo Matsuoka; Shinichi Hohkibara; Etsuo Fukuda; Kazuhiro Tomioka; Hideshi Miyajima; Kouichi Muraoka; Nobuo Hayasaka; Minoru Kimura
We describe equipment and facility operational methods in a production fab which are designed to achieve quick-turnaround-time (QTAT) manufacturing and ease product transfer from development to mass production. An advanced CIM system with precise lot management is introduced to keep the optimum balance of manufacturing TAT and throughput. Substantial end-user computing reduces the engineering holding time for handling development lots. In situ monitoring technologies are applied for the utilization enhancement of plasma-assisted equipment. A 9% manufacturing TAT reduction and a 14% throughput increase are estimated using a manufacturing simulator. The number of wafers in QTAT lots is reduced for processing time reduction. As a result, manufacturing TAT of QTAT lots with reduction from 24 wafers to three is reduced to 56% compared with that of normal lots in the production fab. This new production fab realizes QTAT development and agile product transfer from development to mass production with full process compatibility.
symposium on vlsi technology | 2004
Hiroyuki Kanaya; Kazuhiro Tomioka; T. Matsushita; Mototsugu Omura; T. Ozaki; Y. Kumura; Yoshiro Shimojo; Takuya Morimoto; O. Hidaka; Susumu Shuto; H. Koyama; Yuki Yamada; K. Osari; N. Tokoh; F. Fujisaki; N. Iwabuchi; Naoto Yamaguchi; Tetsu Watanabe; M. Yabuki; H. Shinomiya; Naohiro Watanabe; E. Itoh; T. Tsuchiya; K. Yamakawa; K. Natori; S. Yamazaki; Kou Nakazawa; D. Takashima; S. Shiratake; S. Ohtsuki
Archive | 2009
Yoshiaki Shimooka; Hideki Shibata; Hideshi Miyajima; Kazuhiro Tomioka
Solid-state Electronics | 2006
Yoshinori Kumura; T. Ozaki; Hiroyuki Kanaya; O. Hidaka; Yoshiro Shimojo; Susumu Shuto; Yuki Yamada; Kazuhiro Tomioka; Koji Yamakawa; Soichi Yamazaki; Daisaburo Takashima; Tadashi Miyakawa; Shinichiro Shiratake; Sumito Ohtsuki; Iwao Kunishima; Akihiro Nitayama
Archive | 2003
Ulrich Egger; Haoren Zhuang; Yoshinori Kumura; Kazuhiro Tomioka; Hiroyuki Kanaya
symposium on vlsi technology | 2006
Yoshiro Shimojo; Atsushi Konno; Jun Nishimura; Takayuki Okada; Yuki Yamada; Soichiro Kitazaki; Hironobu Furuhashi; Soichi Yamazaki; Katsunori Yahashi; Kazuhiro Tomioka; Yoshihiro Minami; Hiroyuki Kanaya; Susumu Shuto; Koji Yamakawa; Tohru Ozaki; Hidehiro Shiga; Tadashi Miyakawa; Shinichiro Shiratake; Daisaburo Takashima; Iwao Kunishima; Takeshi Hamamoto; Akihiro Nitayama
Archive | 2005
Yoshinori Kumura; Iwao Kunishima; Hiroyuki Kanaya; Tohru Ozaki; Kazuhiro Tomioka
european solid state device research conference | 2005
Yoshinori Kumura; T. Ozaki; Hiroyuki Kanaya; O. Hidaka; Yoshiro Shimojo; Susumu Shuto; Yuki Yamada; Kazuhiro Tomioka; Koji Yamakawa; Soichi Yamazaki; Daisaburo Takashima; Tadashi Miyakawa; Shinichiro Shiratake; Sumito Ohtsuki; Iwao Kunishima; Akihiro Nitayama
Archive | 2004
Haoren Zhuang; Ulrich Egger; Kazuhiro Tomioka; Jingyu Lian; Nicolas Nagel; Andreas Hilliger; Gerhard Beitel
Archive | 2014
Masatoshi Yoshikawa; Yasuyuki Sonoda; Satoshi Seto; Shuichi Tsubata; Kazuhiro Tomioka
