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Ronald L. Rose

Applied Materials

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Publication

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Archive | 1999

Method for improved remote microwave plasma source for use with substrate processing system

Chien-Teh Kao; Kenneth Tsai; Quyen Pham; Ronald L. Rose; Calvin R. Augason; Joseph Yudovsky

Archive | 1993

Clamping ring and susceptor therefor

Semyon Sherstinsky; Charles C. Harris; Mei Chang; Dale R. Du Bois; James F. Roberts; Susan Telford; Ronald L. Rose; Meng C. Tseng; Karl A. Littau

Archive | 1999

Integrated temperature controlled exhaust and cold trap assembly

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Russell C. Ellwanger; Ronald L. Rose; Joel M. Huston; James Jin-Long Chen

Archive | 1997

Apparatus for improved remote microwave plasma source for use with substrate processing systems

Chien-Teh Kao; Kenneth Tsai; Quyen Pham; Ronald L. Rose; Calvin R. Augason; Joseph Yudovsky

Archive | 1994

Welded susceptor assembly

Sandy M. Chew; Dale R. DuBois; Ronald L. Rose; Manus Wong

Archive | 1994

Temperature controlled gas distribution plate

Salvador P. Umotoy; Avi Tepman; Ronald L. Rose

Archive | 2000

Fastening device for a purge ring

Joseph Yudovsky; Salvador P. Umotoy; Lawrence C. Lei; Ronald L. Rose

Archive | 2000

Cold trap assembly

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Russell C. Ellwanger; Ronald L. Rose; Joel M. Huston; James Jin-Long Chen

Archive | 1999

DEVICE FOR IMPROVED REMOTE MICROWAVE PLASMA SOURCE USED TOGETHER WITH SUBSTRATE TREATING APPARATUS

Chen-Toee Kao; Kenneth Tsai; Kuen Fam; Ronald L. Rose; Calvin R. Augason; Joseph Yudovsky

Archive | 2000

TEMPERATURE CONTROLLED EXHAUST AND COLD TRAP INTEGRATED ASSEMBLY

Salvador P Umotoi; Lei Lawrence Chung-Lai; Ellwanger Russell C; Ronald L. Rose; Joel M. Huston; James Jin-Ron Chan

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Salvador P. Umotoy

Applied Materials

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Joseph Yudovsky

Applied Materials

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Joel M. Huston

Applied Materials

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Calvin R. Augason

Applied Materials

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James Jin-Long Chen

Applied Materials

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Kenneth Tsai

Applied Materials

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Lawrence Chung-Lai Lei

Applied Materials

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Russell C. Ellwanger

Applied Materials

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Chien-Teh Kao

Applied Materials

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Lawrence C. Lei

Applied Materials

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