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Kristin Schupke

Infineon Technologies

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Publication

Featured researches published by Kristin Schupke.

Archive | 2004

Method for fabricating a contact hole plane in a memory module

Hans-Georg Fröhlich; Oliver Genz; Werner Graf; Stefan Gruss; Matthias Handke; Percy Heger; Lars Heineck; Antje Laessig; Alexander Reb; Kristin Schupke; Momtchil Stavrev; Mirko Vogt

Archive | 2002

Method for fabricating a trench capacitor for a semiconductor memory

Matthias Förster; Kristin Schupke; Anja Morgenschweis; Anett Moll; Jens-Uwe Sachse

Archive | 2002

Etch process for recessing polysilicon in trench structures

Stephan Kudelka; Helmut Tews; Alexander Michaelis; Uwe Schroeder; Martin Popp; Kristin Schupke; Daniel Koehler

Archive | 2004

MULTI-LAYER GATE STACK STRUCTURE COMPRISING A METAL LAYER FOR A FET DEVICE, AND METHOD FOR FABRICATING THE SAME

Matthias Goldbach; Frank Jakubowski; Ralf Koepe; Chao-Wen Lay; Kristin Schupke; Michael Schmidt; Cheng-Chih Huang

Archive | 2006

Method for fabricating a semiconductor component

Martin Gutsche; Thomas Hecht; Stefan Jakschik; Matthias Leonhardt; Hans Reisinger; Uwe Schroeder; Kristin Schupke; Harald Seidl

Archive | 2004

Bipolar transistor and method of producing same

Armin Tilke; Kristin Schupke

Archive | 2003

Method for producing a cavity in a monocrystalline silicon substrate and a semiconductor component having a cavity in a monocrystalline silicon substrate with an epitaxial covering layer

Martin Popp; Dietmar Temmler; Kristin Schupke; Uwe Schilling; Kerstin Pomplun

Archive | 2001

Production of a semiconductor element comprises conditioning the surface of the substrate before deposition of a monolayer of a precursor with regard to a reactive ligand of the precursor

Hans Reisinger; Martin Gutsche; Kristin Schupke; Stefan Jakschik; Matthias Leonhardt; Harald Seidl; Uwe Schroeder; Thomas Hecht

Archive | 2004

Method of etching silicon anisotropically

Teng-Wang Huang; Kristin Schupke

Archive | 2006

Structure in a substrate for the manufacturing of a semiconductor device and process for manufacturing of a semiconductor device

Thomas Hecht; Kristin Schupke; Kevin Bauer; Steffen Mueller; Henry Bernhardt

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Stefan Jakschik

Infineon Technologies

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Martin Popp

Infineon Technologies

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Thomas Hecht

Infineon Technologies

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Uwe Schroeder

Infineon Technologies

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Frank Jakubowski

Infineon Technologies

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Hans Reisinger

Infineon Technologies

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Harald Seidl

Infineon Technologies

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Matthias Goldbach

Infineon Technologies

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Matthias Leonhardt

Infineon Technologies

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Michael Schmidt

Infineon Technologies

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