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Miguel A. Saldana

Lam Research

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Publication

Featured researches published by Miguel A. Saldana.

Archive | 2003

Oscillating fixed abrasive CMP system and methods for implementing the same

Miguel A. Saldana; Aleksander Owczarz

Archive | 1999

Spindle assembly for force controlled polishing

Miguel A. Saldana

Archive | 2003

Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing

Miguel A. Saldana; Damon Vincent Williams

Archive | 2002

Apparatus and methods for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing

Miguel A. Saldana; Damon Vincent Williams

Archive | 2000

Chemical mechanical polishing apparatus and methods with central control of polishing pressure applied by polishing head

Miguel A. Saldana; Damon Vincent Williams

Archive | 2000

Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing head

Miguel A. Saldana; Damon Vincent Williams

Archive | 2010

EDGE RING ASSEMBLY FOR PLASMA ETCHING CHAMBERS

Michael S. Kang; Michael C. Kellogg; Miguel A. Saldana; Travis R. Taylor

Archive | 2000

Subaperture chemical mechanical polishing system

Miguel A. Saldana; John M. Boyd; Yehiel Gotkis; Aleksander Owczarz

Archive | 2001

Chemical mechanical polishing apparatus and methods with porous vacuum chuck and perforated carrier film

John M. Boyd; Miguel A. Saldana; Damon Vincent Williams

Archive | 2004

Methods and apparatus for optimal temperature control in a plasma processing system

Miguel A. Saldana; Leonard J. Sharpless; John Daugherty

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Collaboration

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Aleksander Owczarz

Lam Research

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Damon Vincent Williams

Lam Research

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John M. Boyd

Lam Research

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Yehiel Gotkis

Lam Research

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Greg Sexton

Lam Research

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Michael C. Kellogg

Lam Research

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Michael S. Kang

Lam Research

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Travis R. Taylor

Lam Research

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Adrian Kiermasz

Lam Research

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David Wei

Lam Research

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