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Pawan Kumar Nimmakayala

University of Texas System

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Publication

Featured researches published by Pawan Kumar Nimmakayala.

Archive | 2003

Magnification correction employing out-of-plane distortion of a substrate

Pawan Kumar Nimmakayala; Sidlgata V. Sreenivasan; Byung-Jin Choi; Anshuman Cherala

Archive | 2005

Substrate support system

Pawan Kumar Nimmakayala; Sidlgata V. Sreenivasan

Archive | 2004

Interferometric analysis method for the manufacture of nano-scale devices

Pawan Kumar Nimmakayala; Tom H. Rafferty; Alireza Aghili; Byung-Jin Choi; Philip D. Schumaker; Daniel A. Babbs; Van N. Truskett

Archive | 2008

Alignment System and Method for a Substrate in a Nano-Imprint Process

Pawan Kumar Nimmakayala; Byung-Jin Choi

Archive | 2004

System for magnification and distortion correction during nano-scale manufacturing

Anshuman Cherala; Byung-Jin Choi; Pawan Kumar Nimmakayala; Mario J. Meissl; Sidlgata V. Sreenivasan

Archive | 2005

System for varying dimensions of a substrate during nanoscale manufacturing

Anshuman Cherala; Byung-Jin Choi; Pawan Kumar Nimmakayala; Mario J. Meissl; Sidlgata V. Sreenivasan

Archive | 2005

Substrate Support Method

Pawan Kumar Nimmakayala; Sidlgata V. Sreenivasan

Archive | 2005

Apparatus to vary dimensions of a substrate during nano-scale manufacturing

Anshuman Cherala; Byung-Jin Choi; Pawan Kumar Nimmakayala; Mario J. Meissl; Sidlgata V. Sreenivasan

Archive | 2005

Method of varying dimensions of a substrate during nano-scale manufacturing

Anshuman Cherala; Byung-Jin Choi; Pawan Kumar Nimmakayala; Mario J. Meissl; Sidlgata V. Sreenivasan

Archive | 2009

Enhanced Multi Channel Alignment

Pawan Kumar Nimmakayala; Byung-Jin Choi; Tom H. Rafferty; Philip D. Schumaker

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Collaboration

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Byung-Jin Choi

University of Texas System

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Sidlgata V. Sreenivasan

University of Texas System

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Mario J. Meissl

University of Texas at Austin

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Anshuman Cherala

University of Texas System

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Philip D. Schumaker

Canon Inc.

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Ecron Thompson

University of Texas System

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Gerard M. Schmid

University of Texas at Austin

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Michael N. Miller

University of Texas System

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Niyaz Khusnatdinov

University of Texas at Austin

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Daniel A. Babbs

University of Texas System

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