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Robert E. Davenport

Applied Materials

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Publication

Featured researches published by Robert E. Davenport.

Archive | 1995

Apparatus for full wafer deposition

Avi Tepman; Robert E. Davenport

Archive | 2002

Multiple loadlock system

Roger Heyder; Thomas B. Brezocsky; Robert E. Davenport

Archive | 1994

Low thermal expansion clamping mechanism

Jaim Nulman; Robert E. Davenport

Archive | 1997

Chamber design with isolation valve to preserve vacuum during maintenance

Robert E. Davenport

Archive | 1999

Apparatus and method for rotationally aligning and degassing semiconductor substrate within single vacuum chamber

Robert E. Davenport

Archive | 1996

Support platen with removable insert useful in semiconductor processing apparatus

Robert E. Davenport; Avi Tepman

Archive | 1993

Sealing device useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential

Robert E. Davenport; Avi Tepman

Archive | 1995

Semiconductor processing apparatus for promoting heat transfer between isolated volumes

Robert E. Davenport; Avi Tepman

Archive | 1995

Vacuum chamber for ultra high vacuum processing at high temperatures

Seshadri Ramaswami; Robert E. Davenport; Jaim Nulman

Archive | 1999

In-situ getter in process cavity of processing chamber

Thomas Brezoczky; Roger Heyder; Robert E. Davenport

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Avi Tepman

Applied Materials

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Jaim Nulman

Applied Materials

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Seshadri Ramaswami

Applied Materials

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Daniel Redfield

Applied Materials

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Fred C. Redeker

Applied Materials

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Gregory E. Menk

Applied Materials

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Jason Garcheung Fung

Applied Materials

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Mahendra C. Orilall

Applied Materials

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Nag B. Patibandla

Applied Materials

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Rajeev Bajaj

Applied Materials

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