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Seshadri Ramaswami

Applied Materials

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Publication

Featured researches published by Seshadri Ramaswami.

Archive | 1999

Copper target for sputter deposition

Vikram Pavate; Seshadri Ramaswami; Murali Abburi; Murali Narasimhan

Archive | 1997

Method of forming a barrier layer which enables a consistently highly oriented crystalline structure in a metallic interconnect

Kenny King-Tai Ngan; Barry Hogan; Seshadri Ramaswami

Archive | 1997

Method of producing smooth titanium nitride films having low resistivity

Kenny King-Tai Ngan; Seshadri Ramaswami

Archive | 2000

Continuous, non-agglomerated adhesion of a seed layer to a barrier layer

Srinivas Gandikota; Rong Tao; Liang-Yuh Chen; Seshadri Ramaswami

Archive | 1999

Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target

Vikram Pavate; Keith J. Hansen; Glen T. Mori; Murali Narasimhan; Seshadri Ramaswami; Jaim Nulman

Archive | 2001

Target for use in magnetron sputtering of nickel for forming metallization films having consistent uniformity through life

Murali Abburi; Seshadri Ramaswami

Archive | 2000

Method of enhancing hardness of sputter deposited copper films

Vikram Pavate; Murali Abburi; Murali Narasimhan; Seshadri Ramaswami

Archive | 1997

Sputtering method to generate ionized metal plasma using electron beams and magnetic field

Zheng Xu; Seshadri Ramaswami

Archive | 2002

Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma

Ken Ngan; Simon Hui; Seshadri Ramaswami

Archive | 2000

Ti/Tinx underlayer which enables a highly oriented aluminum interconnect

Kenny King-Tai Ngan; Seshadri Ramaswami

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Collaboration

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Kenny King-Tai Ngan

Applied Materials

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Jaim Nulman

Applied Materials

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Murali Narasimhan

Applied Materials

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Vikram Pavate

Applied Materials

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Murali Abburi

Applied Materials

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Barry Hogan

Applied Materials

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Glen T. Mori

Applied Materials

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Keith J. Hansen

Applied Materials

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Robert E. Davenport

Applied Materials

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Simon Hui

Applied Materials

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