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Schultz Joerg

Carl Zeiss AG

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Publication

Featured researches published by Schultz Joerg.

Archive | 2002

SPLIT TYPE OBJECTIVE LENS FOR ILLUMINATION SYSTEM

Schultz Joerg; Epple Alexander; Sohmer Alexander; Wangler Johanness; Grunwald Juergen

Archive | 2001

Astigmatische Komponenten zur Reduzierung des Wabenaspektverhältnisses bei EUV-Beleuchtungssystemen

Schultz Joerg

Archive | 2001

Illumination system for specified wavelengths used especially in EUV lithography includes raster-optical elements selected in number and form to predetermine uniformity of field illumination

Schultz Joerg

Archive | 2000

MICRO LITHOGRAPHY PROJECTION DEVICE

Von Buenau Rudolf; Schultz Joerg; Wangler Johannes

Archive | 1999

ILLUMINATION OPTICAL SYSTEM INVOLVING SLIDING OF LENS, REMA OBJECTIVE LENS AND OPERATING METHOD THEREOF

Schultz Joerg; Wangler Johannes

Archive | 1999

Beleuchtungssystem und REMA-Objektiv mit Linsenverschiebung und Betriebsverfahren dafür

Schultz Joerg; Wangler Johannes

Archive | 2002

Sub-objective for illumination system has two lens groups, second lens group with at least first lens with negative refractive index and at least second lens with positive refractive index

Schultz Joerg; Sohmer Alexander; Epple Alexander; Wangler Johannes

Archive | 2000

Beleuchtungssystem mit mehreren Lichtquellen

Schultz Joerg; Rothweiler Dirk

Archive | 2006

Teilobjektiv für Beleuchtungssystem

Schultz Joerg; Wangler Johannes; Sohmer Alexander; Epple Alexander; Grunwald Juergen

Archive | 2006

Mehrspiegelsystem für ein Beleuchtungssystem

Antoni Martin; Escudero-Sanz Isabel; Singer Wolfgang; Wangler Johannes; Schultz Joerg

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Collaboration

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Wangler Johannes

Carl Zeiss AG

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Epple Alexander

Carl Zeiss AG

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Sohmer Alexander

Carl Zeiss AG

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Singer Wolfgang

Carl Zeiss AG

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Antoni Martin

Carl Zeiss AG

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Deguenther Markus

Carl Zeiss AG

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Dodoc Aurelian

Carl Zeiss AG

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Escudero-Sanz Isabel

Carl Zeiss AG

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Gruner Toralf

Carl Zeiss AG

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Maul Manfred

Carl Zeiss AG

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