Scott M. Dalton

Impact of Heavy Ion Energy and Nuclear Interactions on Single-Event Upset and Latchup in Integrated Circuits

The effects of heavy ion energy and nuclear interactions on the single-event upset (SEU) and single-event latchup (SEL) response of commercial and radiation-hardened CMOS ICs are explored. Above the threshold LET for direct ionization-induced upsets, little difference is observed in single-event upset and latchup cross sections measured using low versus high energy heavy ions. However, significant differences between low- and high-energy heavy ion test results are observed below the threshold LET for single-node direct ionization-induced upsets. The data suggest that secondary particles produced by nuclear interactions play a role in determining the SEU and SEL hardness of integrated circuits, especially at low LET. The role of nuclear interactions and implications for radiation hardness assurance and rate prediction are discussed.

Initial Assessment of the Effects of Radiation on the Electrical Characteristics of

Radiation-induced effects on the electrical characteristics of TaOx memristive (or redox) memory are experimentally assessed. 10 keV x-ray irradiation is observed to cause switching of the memristors from high to low resistance states, as well as functional failure due to cumulative dose. Gamma rays and 4.5 MeV energy protons are not observed to cause significant change in resistance state or device function at levels up to 2.5 Mrad(Si) and 5 Mrad(Si) protons, respectively. 105 MeV and 480 MeV protons cause switching of the memristors from high to low resistance states in some cases, but do not exhibit a consistent degradation. 800 keV silicon ions are observed to cause resistance degradation, with an inverse dependence of resistance on oxygen vacancy density. Variation between different devices appears to be a key factor in determining the electrical response resulting from irradiation. The proposed degradation mechanism likely involves the creation of oxygen vacancies, but a better fundamental understanding of switching is needed before a definitive understanding of radiation degradation can be achieved.

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Large, unexpected shifts in the current-voltage (IV) characteristics of commercial power MOSFETs irradiated with heavy ions have been observed. The shifts can be more than sixty-five times larger than the shifts resulting from total dose irradiation with gamma rays or electrons, and are shown to strongly depend on both the irradiation bias and the ion linear energy transfer (LET). These large shifts are a significant concern for devices intended to operate in low power space applications because it is shown that they can lead to off-state leakage currents greater than 1 A. The data are consistent with the formation of parasitic transistors resulting from the microdose deposited in the gate oxides of these devices by the heavy ions. These results have significant implications for hardness assurance testing of MOS devices for use in space.

Memristive Memories

The total dose hardness of several commercial power MOSFET technologies is examined. After exposure to 20 krad(SiO/sub 2/) most of the n- and p-channel devices examined in this work show substantial (2 to 6 orders of magnitude) increases in off-state leakage current. For the n-channel devices, the increase in radiation-induced leakage current follows standard behavior for moderately thick gate oxides, i.e., the increase in leakage current is dominated by large negative threshold voltage shifts, which cause the transistor to be partially on even when no bias is applied to the gate electrode. N-channel devices biased during irradiation show a significantly larger leakage current increase than grounded devices. The increase in leakage current for the p-channel devices, however, was unexpected. For the p-channel devices, it is shown using electrical characterization and simulation that the radiation-induced leakage current increase is related to an increase in the reverse bias leakage characteristics of the gated diode which is formed by the drain epitaxial layer and the body. This mechanism does not significantly contribute to radiation-induced leakage current in typical p-channel MOS transistors. The p-channel leakage current increase is nearly identical for both biased and grounded irradiations and therefore has serious implications for long duration missions since even devices which are usually powered off could show significant degradation and potentially fail.

Enhanced Degradation in Power MOSFET Devices Due to Heavy Ion Irradiation

It is shown that protons and neutrons can induce enhanced degradation in power MOSFETs, including both trench and planar geometry devices. Specifically, large shifts in current-voltage characteristics can be observed at extremely low proton total dose levels (as low as ~ 2 rad(SiO2)). These shifts can induce significant increases in device ldquooffrdquo state leakage current. Neutron irradiations show similar degradation at equivalent fluence levels, even though neutrons do not deposit dose due to direct ionization. These data suggest that the mechanism responsible for the enhanced degradation is a microdose effect associated with secondary particles produced through nuclear interactions between protons and neutrons and the materials in integrated circuits. The secondary particles deposit enough charge in the gate oxide to induce a parasitic drain to source leakage path in the transistor. Although the results are demonstrated here for only trench and planar geometry power MOSFETs, microdose effects can impact the radiation response of other integrated circuit types. Hardness assurances issues implications are discussed.

Radiation-induced off-state leakage current in commercial power MOSFETs

The effects of radiation on memristors created using tantalum oxide and titanium oxide are compared. Both technologies show changes in resistance when exposed to 800 keV Ta ion irradiation at fluences above 1010 cm-2. TaOx memristors show a gradual reduction in resistance at high fluences whereas TiO2 memristors show gradual increases in resistance with inconsistent decreases. After irradiation TaOx devices remain fully functional and can even recover resistance with repeated switching. TiO2 devices are more variable and exhibit significant increases and decreases in resistance when switching after irradiation. Irradiation with 28 MeV Si ions causes both technologies to switch from the off-state to the on-state when ionizing doses on the order of 60 Mrad(Si) or greater (as calculated by SRIM) are reached without applying current or voltage to the part. Irradiation with 10 keV X-rays up to doses of 18 Mrad(Si) in a single step show little effect on either technology. TaOx and TiO2 memristors both show high tolerance for displacement damage and ionization damage and are promising candidates for future radiation-hardened non-volatile memory applications.

Enhanced Proton and Neutron Induced Degradation and Its Impact on Hardness Assurance Testing

The feasibility of developing an embeddable silicon-on-insulator (SOI) buried oxide MOS dosimeter (RadFET) has been demonstrated. This dosimeter takes advantage of the inherent properties for radiation-induced charge buildup in the buried oxides of commercial SOI wafers. Discrete SOI buried oxide RadFETs and fully-functional read-out circuitry have been fabricated in Sandias CMOS7 radiation-hardened SOI technology. Discrete RadFETs have been irradiated under various radiation conditions and subjected to post-irradiation anneals. Data show only a small dose rate dependence and less than a 10% annealing or fade of the dosimeters output characteristics when irradiated with all pins shorted. These results show less fade than dual-dielectric RadFETs irradiated under the same bias conditions and support the use of SOI buried oxide RadFETs for low dose rate applications. Read-out circuitry has also been designed and fabricated to monitor changes in the ¿off¿ state leakage current induced by radiation-induced charge buildup in the buried oxide dosimeter. The analog-to-digital output from the read-out circuit changes linearly with the ¿off¿ state leakage current. Preliminary radiation characterizations of the read-out circuitry show no spurious effects of radiation-induced charge buildup in the read-out circuitry on the dosimeter output. These results indicate it is feasible to develop an embeddable SOI buried oxide RadFET as an attractive choice for many low power, low dose rate applications requiring real-time knowledge of total ionizing dose radiation levels.

A Comparison of the Radiation Response of

The heavy-ion induced electron/hole charge yield in silicon-oxide versus electric field is presented. The heavy-ion charge yield was determined by comparing the voltage shifts of MOSFET transistors irradiated with 10-keV X-rays and several different heavy ions. The obtained charge yield for the heavy ions is in average nearly an order of magnitude lower than for the X-rays for the entire range of measured electric fields.

{\rm TaO}_{\rm x}

The amounts of charge collection by single-photon absorption (SPA) and by two-photon absorption (TPA) laser testing techniques have been directly compared using specially made SOI diodes. For SPA measurements and some TPA measurements, the back substrates of the diodes were removed by etching with XeF2. With the back substrates removed, the amount of TPA induced charge collection can be correlated to the amount of SPA induced charge collection. There are significant differences, however, in the amount of TPA induced charge collection for diodes with and without substrates. For the SOI diodes of this study, this difference appears to arise from several contributions, including nonlinear-optical losses and distortions that occur as the pulse propagates through the substrate, as well as displacement currents that occur only when the back substrate is present. These results illustrate the complexity of interpreting TPA and SPA single-event upset measurements.

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The potential for using the degraded beam of high-energy proton radiation sources for proton hardness assurance testing for ICs that are sensitive to proton direct ionization effects are explored. SRAMs were irradiated using high energy proton radiation sources (~67-70 MeV). The proton energy was degraded using plastic or Al degraders. Peaks in the SEU cross section due to direct ionization were observed. To best observe proton direct ionization effects, one needs to maximize the number of protons in the energy spectrum below the proton energy SEU threshold. SRIM simulations show that there is a tradeoff between increasing the fraction of protons in the energy spectrum with low energies by decreasing the peak energy and the reduction in the total number of protons as protons are stopped in the device as the proton energy is decreased. Two possible methods for increasing the number of low energy protons is to decrease the primary proton energy to reduce the amount of energy straggle and to place the degrader close to the DUT to minimize angular dispersion. These results suggest that high-energy proton radiation sources may be useful for identifying devices sensitive to proton direct ionization.