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Larios John M. De

Lam Research

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Publication

Featured researches published by Larios John M. De.

Archive | 2004

Method and apparatus for removing a residual organic layer from a substrate using reactive gases

Larios John M. De

Archive | 2008

Method and apparatus for contained chemical surface treatment

Katrina Mikhaylichenko; Fritz C. Redeker; Erik M. Freer; Mikhail Korolik; Larios John M. De; Mike Ravkin

Archive | 2007

Measuring fluid quantities, blending liquid constituents, and dispensing blends

Aleksander Owczarz; Robert Knop; Mike Ravkin; Larios John M. De

Archive | 2005

System and method of cleaning and etching a substrate

Mikhail Korolik; John M. Boyd; Katrina A. Mikhaylich; Michael Ravkin; Fred C. Redeker; Larios John M. De

Archive | 2005

Proximity head substrate meniscus flow modulation

James P. Garcia; Fred C. Redeker; Larios John M. De

Archive | 2004

System and method for integrating in-situ metrology within a wafer treatment process

John M. Boyd; Larios John M. De; Michael Ravkin; Fred C. Redeker

Archive | 2010

VERFAHREN ZUR BEREITSTELLUNG EINER EINGEGRENZTEN FLÜSSIGKEIT FÜR DIE IMMERSIONSLITHOGRAPHIE

David Hemker; Fred C. Redeker; John M. Boyd; Larios John M. De; Michael Ravkin; Mikhail Korolik

Archive | 2010

Apparatus for depositing and planarizing thin film of semiconductor wafer

John M. Boyd; Larios John M. De; Yezdi Dordi; Mike Ravkin; Fred C. Redeker; デラリオス・ジョン・エム．; ドーディ・イエッジ・エヌ．; ボイド・ジョン; ラヴキン・マイク; レデカー・フレッド・シー．

Archive | 2008

Procédé et appareil pour un traitement chimique de surface confiné

Katrina Mikhaylichenko; Fritz C. Redeker; Erik M. Freer; Mikhail Korolik; Larios John M. De; Mike Ravkin

Archive | 2008

Nahfeldkopf mit gewinkeltem vakuumleitungssystem sowie entsprechende vorrichtung und entsprechendes verfahren

Michael Ravkin; Larios John M. De; Fred C. Redeker; Mikhail Korolik; Erik M. Freer

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Collaboration

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Fred C. Redeker

Lam Research

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Mikhail Korolik

Lam Research

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Michael Ravkin

Lam Research

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Mike Ravkin

Lam Research

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John M. Boyd

Lam Research

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Carl Woods

Lam Research

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James P. Garcia

Lam Research

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Afshin Nickhou

Lam Research

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Erik M. Freer

Lam Research

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Michael G. R. Smith

Lam Research

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