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Stuart M. Burns

IBM

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Publication

Featured researches published by Stuart M. Burns.

Archive | 1997

Self-aligned diffused source vertical transistors with stack capacitors in a 4F-square memory cell array

Stuart M. Burns; Hussein I. Hanafi; Jeffrey J. Welser; Waldemar Walter Kocon; Howard Leo Kalter

Archive | 1997

4F-square memory cell having vertical floating-gate transistors with self-aligned shallow trench isolation

Stuart M. Burns; Hussein I. Hanafi; Jeffrey J. Welser; Waldemar Walter Kocon

Archive | 1998

2F-square memory cell for gigabit memory applications

Stuart M. Burns; Hussein I. Hanafi

Archive | 1997

Self-aligned diffused source vertical transistors with deep trench capacitors in a 4F-square memory cell array

Stuart M. Burns; Hussein I. Hanafi; Howard Leo Kalter; Jeffrey J. Welser; Waldemar Walter Kocon

Archive | 1996

Low pressure and low power C12 /HC1 process for sub-micron metal etching

Munir D. Naeem; Stuart M. Burns; Rosemary Christie; Virinder Singh Grewal; Walter W. Kocon; Masaki Narita; Bruno Spuler; Chi-Hua Yang

Archive | 1999

Field effect transistors with improved implants and method for making such transistors

Diane C. Boyd; Stuart M. Burns; Hussein I. Hanafi; Yuan Taur; William C. Wille

Archive | 1997

Silicon sidewall etching

Stuart M. Burns; Hussein I. Hanafi; Waldemar Walter Kocon; Jeffrey J. Welser

Archive | 1997

Methods for metal etching with reduced sidewall build up during integrated circuit manufacturing

Munir D. Naeem; Stuart M. Burns; Nancy Anne Greco; Steve Greco; Virinder Singh Grewal; Ernest N. Levine; Masaki Narita; Bruno Spuler

Archive | 1999

Sacrificial silicon sidewall for damascene gate formation

Stuart M. Burns; Hussein I. Hanafi

Archive | 1998

Method for making field effect transistors having sub-lithographic gates with vertical side walls

Diane C. Boyd; Stuart M. Burns; Hussein I. Hanafi; Yuan Taur; William C. Wille

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Hussein I. Hanafi

IBM

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Waldemar Walter Kocon

IBM

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Diane C. Boyd

IBM

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William C. Wille

IBM

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Jeffrey J. Welser

IBM

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Yuan Taur

University of California

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Munir D. Naeem

IBM

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Bruno Spuler

IBM

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Howard Leo Kalter

IBM

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Masaki Narita

IBM

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