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Thomas E. Deacon

Applied Materials

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Publication

Featured researches published by Thomas E. Deacon.

Archive | 1995

Gas distribution for CVD systems

Thomas E. Deacon; David Cheung; Peter Wai-Man Lee; Judy H. Huang

Archive | 1992

Thermally processing semiconductor wafers at non-ambient pressures

David V. Adams; Roger N. Anderson; Thomas E. Deacon

Archive | 1991

Apparatus and method for substrate heating utilizing various infrared means to achieve uniform intensity

Roger N. Anderson; Thomas E. Deacon; David K. Carlson

Archive | 1989

Pressure resistant thermal reactor system for semiconductor processing

David V. Adams; Roger N. Anderson; Thomas E. Deacon

Archive | 1998

Method for depositing low dielectric constant oxide films

Dung Ching Perng; Peter Wai-Man Lee; Thomas E. Deacon

Archive | 2001

Lamp array for thermal processing chamber

Thomas E. Deacon; Roger N. Anderson; David K. Carlson; Paul B. Comita

Archive | 1991

Apparatus and method for substrate heating in semiconductor processes

Roger N. Anderson; Thomas E. Deacon; David K. Carlson

Archive | 1996

Delineation pattern for epitaxial depositions

Thomas E. Deacon; Norma B. Riley

Archive | 2000

Apparatus for depositing low dielectric constant oxide film

Dung Ching Perng; Peter Wai-Man Lee; Thomas E. Deacon

Archive | 1991

Radiantly heated reactor

Roger N. Anderson; David K. Carlson; Thomas E. Deacon

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Roger N. Anderson

Applied Materials

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David K. Carlson

Applied Materials

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David V. Adams

Applied Materials

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Peter Wai-Man Lee

Applied Materials

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Norma B. Riley

Applied Materials

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Dung Ching Perng

National Cheng Kung University

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David Cheung

Applied Materials

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Judy H. Huang

Applied Materials

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Paul B. Comita

Applied Materials

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