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Yung-Hsu Wu

TSMC

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Publication

Featured researches published by Yung-Hsu Wu.

Archive | 2015

Integrated circuits with reduced pitch and line spacing and methods of forming the same

Hsin-Chieh Yao; Chung-Ju Lee; Yung-Hsu Wu; Tien-I Bao; Shau-Lin Shue

Archive | 2015

Self-Aligned Double Spacer Patterning Process

Cheng-Hsiung Tsai; Yung-Hsu Wu; Tsung-Min Huang; Chung-Ju Lee; Tien-I Bao; Shau-Lin Shue

Archive | 2015

Spacer-damage-free etching

Tsung-Min Huang; Chung-Ju Lee; Yung-Hsu Wu

Archive | 2017

Method of Double Patterning Lithography process Using Plurality of Mandrels for Integrated Circuit Applications

Chung-Ju Lee; Hsin-Chieh Yao; Shau-Lin Shue; Tien-I Bao; Yung-Hsu Wu

Archive | 2013

Lithography Using High Selectivity Spacers for Pitch Reduction

Yu-Sheng Chang; Chung-Ju Lee; Cheng-Hsiung Tsai; Yung-Hsu Wu; Hsiang-Huan Lee; Hai-Ching Chen; Ming-Feng Shieh; Tien-I Bao; Ru-Gun Liu; Tsai-Sheng Gau; Shau-Lin Shue

Archive | 2011

Dielectric protection layer as a chemical-mechanical polishing stop layer

Yung-Hsu Wu; Hsin-Hsien Lu; Tien-I Bao; Shau-Lin Shue

Archive | 2013

Semiconductor Device having Voids and Method of Forming Same

Yung-Hsu Wu; Chien-Hua Huang; Chung-Ju Lee; Tien-I Bao; Shau-Lin Shue

Archive | 2016

Method of fabricating semiconductor device with reduced trench distortions

Yung-Sung Yen; Chung-Ju Lee; Chun-Kuang Chen; Chia-Tien Wu; Ta-Ching Yu; Kuei-Shun Chen; Ru-Gun Liu; Shau-Lin Shue; Tsai-Sheng Gau; Yung-Hsu Wu

Archive | 2016

METHOD OF FORMING AN INTERCONNECT STRUCTURE FOR A SEMICONDUCTOR DEVICE

Yung-Hsu Wu; Cheng Hsiung Tsai; Yu-Sheng Chang; Chia-Tien Wu; Chung-Ju Lee; Yung-Sung Yen; Chun-Kuang Chen; Tien-I Bao; Ru-Gun Liu; Shau-Lin Shue

Archive | 2012

System and method for chemical-mechanical planarization of a metal layer

Yung-Hsu Wu; Shih-Kang Fu; Hsin-Chieh Yao; Hsiang-Huan Lee; Chung-Ju Lee; Hai-Ching Chen; Shau-Lin Shue

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Shau-Lin Shue

TSMC

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Chung-Ju Lee

TSMC

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Tien-I Bao

TSMC

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Chia-Tien Wu

TSMC

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Hsin-Chieh Yao

TSMC

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Ru-Gun Liu

TSMC

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Yu-Sheng Chang

TSMC

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Cheng-Hsiung Tsai

TSMC

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Chun-Kuang Chen

TSMC

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Hai-Ching Chen

TSMC

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