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Dive into the research topics where Ulrich Löring is active.

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Featured researches published by Ulrich Löring.


Archive | 2007

SYMMETRICAL OBJECTIVE HAVING FOUR LENS GROUPS FOR MICROLITHOGRAPHY

Gerhard Fürter; Ulrich Löring; Daniel Krähmer; Aurelian Dodoc; Heiko Feldmann; David Shafer; Wilhelm Ulrich; Holger Walter; Johannes Zellner


Archive | 2004

Refractive projection objective for production of semiconductor elements by immersion microlithography, comprises five lens groups and a system screen, forming a single-waist system of light beam diameters

Markus Brotsack; Toralf Gruner; Alexander Hirnet; Michael Lill; Ulrich Löring; Alexandra Pazidis; Patrick Scheible; Harald Schink; Karl-Heinz Schuster; Karl-Stefan Weissenrieder; Christoph Zaczek


Archive | 2010

Optical system, exposure apparatus, and waverfront correction method

Matthias Exler; Ulrich Löring; Toralf Gruner; Holger Walter


Archive | 2016

SURFACE CORRECTION OF MIRRORS WITH DECOUPLING COATING

Oliver Dier; Tobias Hackl; Franz-Josef Stickel; Ulrich Löring; Tilmann Aßmus; Jürgen Müller; Vladimir Kamenov; Siegfried Rennon


Archive | 2013

Optical arrangement for euv lithography

Norman Baer; Toralf Gruner; Ulrich Löring


Archive | 2011

Method of operating a projection exposure tool

Olaf Conradi; Michael Totzeck; Ulrich Löring; Dirk Jürgens; Ralf Müller; Christian Wald


Archive | 2009

Optische Vorrichtung mit verbessertem Abbildungsverhalten sowie Verfahren zum Verbessern des Abbildungsverhaltens einer optischen Vorrichtung

Holger Walter; Ulrich Löring; Daniel Krähmer; Johannes Zellner


Archive | 2016

PROJECTION OBJECTIVE SYSTEM FOR MICROLITHOGRAPHY, PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE METHOD, AND OPTICAL CORRECTION PLATE

Ulrich Löring; Gerd Reisinger; Franz-Josef Stickel; Sonja Schneider; Johann Trenkler; Kraus Stefan; Gordon Doering; Genelmayer Axel


Archive | 2015

Projektionsobjektiv mit Wellenfrontmanipulator

Maike Trenkel-Lenz; Wolfgang Scherm; Holger Walter; Vladimir Kamenov; Michael Stolz; Johannes Lippert; Axel Lorenz; Andreas Frommeyer; Claudia Ekstein; Pascal Marsollek; Stephanus Fengler; Wolfgang Emer; Ulrich Löring; Boris Bittner


Archive | 2015

Projektionsobjektiv mit Wellenfrontmanipulator Projection Lens with wavefront manipulator

Maike Trenkel-Lenz; Wolfgang Scherm; Holger Walter; Vladimir Kamenov; Michael Stolz; Johannes Lippert; Axel Lorenz; Andreas Frommeyer; Claudia Ekstein; Pascal Marsollek; Stephanus Fengler; Wolfgang Emer; Ulrich Löring; Boris Bittner

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