Ulrich Löring | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Ulrich Löring is active.

Explore More

Publication

Featured researches published by Ulrich Löring.

Archive | 2007

SYMMETRICAL OBJECTIVE HAVING FOUR LENS GROUPS FOR MICROLITHOGRAPHY

Gerhard Fürter; Ulrich Löring; Daniel Krähmer; Aurelian Dodoc; Heiko Feldmann; David Shafer; Wilhelm Ulrich; Holger Walter; Johannes Zellner

Archive | 2004

Refractive projection objective for production of semiconductor elements by immersion microlithography, comprises five lens groups and a system screen, forming a single-waist system of light beam diameters

Markus Brotsack; Toralf Gruner; Alexander Hirnet; Michael Lill; Ulrich Löring; Alexandra Pazidis; Patrick Scheible; Harald Schink; Karl-Heinz Schuster; Karl-Stefan Weissenrieder; Christoph Zaczek

Archive | 2010

Optical system, exposure apparatus, and waverfront correction method

Matthias Exler; Ulrich Löring; Toralf Gruner; Holger Walter

Archive | 2016

SURFACE CORRECTION OF MIRRORS WITH DECOUPLING COATING

Oliver Dier; Tobias Hackl; Franz-Josef Stickel; Ulrich Löring; Tilmann Aßmus; Jürgen Müller; Vladimir Kamenov; Siegfried Rennon

Archive | 2013

Optical arrangement for euv lithography

Norman Baer; Toralf Gruner; Ulrich Löring

Archive | 2011

Method of operating a projection exposure tool

Olaf Conradi; Michael Totzeck; Ulrich Löring; Dirk Jürgens; Ralf Müller; Christian Wald

Archive | 2009

Optische Vorrichtung mit verbessertem Abbildungsverhalten sowie Verfahren zum Verbessern des Abbildungsverhaltens einer optischen Vorrichtung

Holger Walter; Ulrich Löring; Daniel Krähmer; Johannes Zellner

Archive | 2016

PROJECTION OBJECTIVE SYSTEM FOR MICROLITHOGRAPHY, PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE METHOD, AND OPTICAL CORRECTION PLATE

Ulrich Löring; Gerd Reisinger; Franz-Josef Stickel; Sonja Schneider; Johann Trenkler; Kraus Stefan; Gordon Doering; Genelmayer Axel

Archive | 2015

Projektionsobjektiv mit Wellenfrontmanipulator

Maike Trenkel-Lenz; Wolfgang Scherm; Holger Walter; Vladimir Kamenov; Michael Stolz; Johannes Lippert; Axel Lorenz; Andreas Frommeyer; Claudia Ekstein; Pascal Marsollek; Stephanus Fengler; Wolfgang Emer; Ulrich Löring; Boris Bittner

Archive | 2015