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Yiheng Xu

IBM

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Publication

Featured researches published by Yiheng Xu.

Archive | 2013

ADVANCED INTERCONNECT WITH AIR GAP

John H. Zhang; Yann Mignot; Lawrence A. Clevenger; Carl J. Radens; Richard S. Wise; Yiheng Xu; Yannick Loquet; Hsueh-Chung Chen

Archive | 2012

System and method of plating conductive gate contacts on metal gates for self-aligned contact interconnections

John H. Zhang; Lawrence A. Clevenger; Carl J. Radens; Yiheng Xu

Archive | 2011

USING BACKSIDE PASSIVE ELEMENTS FOR MULTILEVEL 3D WAFERS ALIGNMENT APPLICATIONS

John H. Zhang; Lawrence A. Clevenger; Yiheng Xu

Archive | 2012

SYSTEM AND METHOD OF COMBINING DAMASCENES AND SUBTRACT METAL ETCH FOR ADVANCED BACK END OF LINE INTERCONNECTIONS

John H. Zhang; Lawrence A. Clevenger; Carl J. Radens; Yiheng Xu; Walter Kleemeier; Cindy Goldberg

Archive | 2013

Trench interconnect having reduced fringe capacitance

John H. Zhang; Hsueh-Chung Chen; Lawrence A. Clevenger; Yann Mignot; Carl J. Radens; Richard S. Wise; Yannick Loquet; Yiheng Xu

Archive | 2015

SELECTIVE PASSIVATION OF VIAS

Tien-Jen Cheng; Lawrence A. Clevenger; Terence Kane; Carl J. Radens; Andrew H. Simon; Yun-Yu Wang; Yiheng Xu; John H. Zhang

Archive | 2014

TRENCH STRUCTURE FOR HIGH PERFORMANCE INTERCONNECTION LINES OF DIFFERENT RESISTIVITY AND METHOD OF MAKING SAME

John H. Zhang; Lawrence A. Clevenger; Carl J. Radens; Yiheng Xu; Richard S. Wise

Archive | 2013

MODULAR FUSES AND ANTIFUSES FOR INTEGRATED CIRCUITS

John H. Zhang; Lawrence A. Clevenger; Carl J. Radens; Yiheng Xu; Edem Wornyo

Archive | 2012

ELECTROSTATIC DISCHARGE DEVICES FOR INTEGRATED CIRCUITS

John H. Zhang; Lawrence A. Clevenger; Carl J. Radens; Yiheng Xu

Archive | 2013

Through silicon via structure for internal chip cooling

John H. Zhang; Lawrence A. Clevenger; Carl J. Radens; Yiheng Xu; Edem Wornyo

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Collaboration

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Lawrence A. Clevenger

IBM

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John H. Zhang

IBM

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Carl J. Radens

IBM

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Richard S. Wise

IBM

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Edem Wornyo

Georgia Institute of Technology

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Hsueh-Chung Chen

IBM

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Joyeeta Nag

IBM

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Vincent J. McGahay

IBM

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Walter Kleemeier

IBM

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Yann Mignot

IBM

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