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Dive into the research topics where Michael G. Chafin is active.

Publication


Featured researches published by Michael G. Chafin.


Archive | 1997

Hybrid Johnsen-Rahbek electrostatic chuck having highly resistive mesas separating the chuck from a wafer supported thereupon and method of fabricating same

Dennis S. Grimard; Vijay D. Parkhe; Hyman J. Levinstein; Fusen Chen; Michael G. Chafin


Archive | 1997

High density plasma process chamber

Shamouil Shamouilian; Ananda H. Kumar; Arnold Kholodenko; Dennis S. Grimard; Jonathan D. Mohn; Michael G. Chafin; Kenneth S. Collins


Archive | 2004

Plasma control using dual cathode frequency mixing

Steven Shannon; Dennis S. Grimard; Theodoros Panagopoulos; Daniel J. Hoffman; Michael G. Chafin; Troy S. Detrick; Alexander Paterson; Jingbao Liu; Taeho Shin; Bryan Pu


Archive | 1995

Barrier seal for electrostatic chuck

Joseph F. Salfelder; Dennis S. Grimard; John F. Cameron; Chandra Deshpandey; Robert E. Ryan; Michael G. Chafin


Archive | 1999

SUBSTRATE SUPPORT FOR PLASMA PROCESSING

Shamouil Shamouilian; Ananda H. Kumar; Siamak Salimian; Mahmoud Dahimene; Michael G. Chafin; Dennis S. Grimard


Archive | 1998

Connectors for an electrostatic chuck and combination thereof

Shamouil Shamouilian; Ananda H. Kumar; Arnold Kholodenko; Dennis S. Grimard; Liang Guo Wang; Gerhard Schneider; Michael G. Chafin; Semyon L. Kats; Alexander M. Veytser; Senh Thach


Archive | 2001

Heated catalytic treatment of an effluent gas from a substrate fabrication process

Tony S. Kaushal; Shamouil Shamouilian; Harshad Borgaonkar; Kwok Manus Wong; Michael G. Chafin; Ashish Bhatnagar


Archive | 2001

Electrostatic chuck with dielectric coating

Arnold Kholodenko; Michael G. Chafin; Brad L. Mays; Tetsuya Ishikawa; Amanda H. Kumar; Dennis S. Grimard


Archive | 2003

Etching of high aspect ratio features in a substrate

Ajay Kumar; Anisul Khan; Alan Ouye; Ralph M. Wadensweiler; Ananda H. Kumar; Michael G. Chafin; Arnold Kholodenko; Dragan Podlesnik


Archive | 2010

Electrostatic chuck with reduced arcing

Michael D. Willwerth; David Palagashvili; Douglas A. Buchberger; Michael G. Chafin

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