Wing L. Cheng | Researchain

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Featured researches published by Wing L. Cheng.

Archive | 1999

Electrostatic chuck having gas cavity and method

Arnold Kholodenko; Shamouil Shamouilian; You Wang; Wing L. Cheng; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Ananda H. Kumar

Archive | 2007

Substrate support having heat transfer system

Andrew Nguyen; Wing L. Cheng; Hiroji Hanawa; Semyon L. Kats; Kartik Ramaswamy; Yan Ye; Kwok Manus Wong; Daniel J. Hoffman; Tetsuya Ishikawa; Brian Lue

Archive | 2001

Electrostatic chuck bonded to base with a bond layer and method

You Wang; Shamouil Shamouilian; Arnold Kholodenko; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 2001

Electrostatic chuck having heater and method

You Wang; Shamouil Shamouilian; Arnold Kholodenko; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 2001

Process chamber having multiple gas distributors and method

Arnold Kholodenko; Dan Katz; Wing L. Cheng

Archive | 1999

Electrostatic chuck having composite base and method

Shamouil Shamouilian; Ananda H. Kumar; Arnold Kholodenko; You Wang; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng

Archive | 2001

Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber

Dennis S. Grimard; Arnold Kholodenko; Alex Veytser; Senh Thach; Wing L. Cheng

Archive | 2000

Substrate support tolerant to thermal expansion stresses

You Wang; Arnold Kholodenko; Shamouil Shamouilian; Alexander M. Veytser; Wing L. Cheng

Archive | 2010

Substrate support having fluid channel

Andrew Nguyen; Wing L. Cheng; Hiroji Hanawa; Semyon L. Kats; Kartik Ramaswamy; Yan Ye; Kwok Manus Wong; Daniel J. Hoffman; Tetsuya Ishikawa; Brian Lue

Archive | 1999

Electrostatic chuck having improved electrical connector and method

Shamouil Shamouilian; You Wang; Surinder S. Bedi; Arnold Kholodenko; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

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