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Surinder S. Bedi

Applied Materials

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Publication

Featured researches published by Surinder S. Bedi.

Archive | 1999

Electrostatic chuck having gas cavity and method

Arnold Kholodenko; Shamouil Shamouilian; You Wang; Wing L. Cheng; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Ananda H. Kumar

Archive | 2001

Electrostatic chuck bonded to base with a bond layer and method

You Wang; Shamouil Shamouilian; Arnold Kholodenko; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 1998

Puncture resistant electrostatic chuck

Arik Donde; Hyman J. Levinstein; Robert W. Wu; Andreas G. Hegedus; Edwin C. Weldon; Shamouil Shamouilian; Jon Clinton; Surinder S. Bedi

Archive | 2001

Electrostatic chuck having heater and method

You Wang; Shamouil Shamouilian; Arnold Kholodenko; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 1999

Polymer chuck with heater and method of manufacture

Surinder S. Bedi; Shamouil Shamouilian; Syed H. Askari; Arnold Kholodenko; Jon Clinton; Alexander M. Veytser; Liang-Guo Wang; You Wang

Archive | 1999

Electrostatic chuck having composite base and method

Shamouil Shamouilian; Ananda H. Kumar; Arnold Kholodenko; You Wang; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng

Archive | 1998

Multi-electrode electrostatic chuck having fuses in hollow cavities

Jon Clinton; Anand H. Kumar; Shamouil Shamouilian; You Wang; Surinder S. Bedi

Archive | 1999

Electrostatic chuck having improved electrical connector and method

Shamouil Shamouilian; You Wang; Surinder S. Bedi; Arnold Kholodenko; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Wing L. Cheng; Ananda H. Kumar

Archive | 1999

Electrostatic chuck with improved temperature control and puncture resistance

Shamouil Shamouilian; Arnold Kholodenko; Semyon L. Kats; Semyon Sherstinsky; Jon Clinton; Surinder S. Bedi

Archive | 1999

Support for supporting a substrate in a process chamber

Kadthala R. Narendrnath; Syed H. Askari; Dennis S. Grimard; Surinder S. Bedi; Ananda H. Kumar; Shamouil Shamouilian

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Shamouil Shamouilian

Applied Materials

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You Wang

Applied Materials

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Arnold Kholodenko

Applied Materials

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Alexander M. Veytser

Applied Materials

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Ananda H. Kumar

Applied Materials

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Dennis S. Grimard

Applied Materials

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Kadthala R. Narendrnath

Applied Materials

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Semyon L. Kats

Applied Materials

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Jon Clinton

Applied Materials

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Wing L. Cheng

Applied Materials

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