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Carl Woods

Lam Research

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Publication

Featured researches published by Carl Woods.

Archive | 2003

Methods and systems for processing a substrate using a dynamic liquid meniscus

James P. Garcia; John M. de Larios; Michael Ravkin; Fred C. Redeker; Carl Woods

Archive | 2003

Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces

John M. de Larios; Mike Ravkin; Carl Woods; Fritz C. Redeker; James P. Garcia

Archive | 2003

Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus

Carl Woods; James P. Garcia; John M. de Larios

Archive | 2002

System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold

Carl Woods; John M. de Larios

Archive | 2003

Vertical proximity processor

James P. Garcia; Mike Ravkin; Carl Woods; Fred C. Redeker; John M. de Larios

Archive | 2006

Meniscus, vacuum, IPA vapor, drying manifold

Carl Woods; James P. Garcia; John M. de Larios

Archive | 2004

Proximity meniscus manifold

Carl Woods; Michael G. R. Smith; John Parks; James P. Garcia; John M. de Larios

Archive | 2004

Substrate meniscus interface and methods for operation

Carl Woods

Archive | 2005

Substrate proximity processing structures and methods for using and making the same

Carl Woods; Michael G. R. Smith; John Parks

Archive | 2005

Method and Apparatus for Plating Semiconductor Wafers

Yezdi Dordi; Bob Maraschin; John M. Boyd; Fred C. Redeker; Carl Woods

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James P. Garcia

Lam Research

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Fred C. Redeker

Lam Research

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Michael G. R. Smith

Lam Research

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Mike Ravkin

Lam Research

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John Parks

Lam Research

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John M. de Larios

Lam Research

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Larios John M. De

Lam Research

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Afshin Nickhou

Lam Research

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John M. Boyd

Lam Research

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Michael Ravkin

Lam Research

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