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James P. Garcia

Lam Research

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Publication

Featured researches published by James P. Garcia.

Archive | 2003

Methods and systems for processing a substrate using a dynamic liquid meniscus

James P. Garcia; John M. de Larios; Michael Ravkin; Fred C. Redeker; Carl Woods

Archive | 2003

Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces

John M. de Larios; Mike Ravkin; Carl Woods; Fritz C. Redeker; James P. Garcia

Archive | 2003

Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus

Carl Woods; James P. Garcia; John M. de Larios

Archive | 2003

Vertical proximity processor

James P. Garcia; Mike Ravkin; Carl Woods; Fred C. Redeker; John M. de Larios

Archive | 2006

Meniscus, vacuum, IPA vapor, drying manifold

Carl Woods; James P. Garcia; John M. de Larios

Archive | 2004

Proximity meniscus manifold

Carl Woods; Michael G. R. Smith; John Parks; James P. Garcia; John M. de Larios

Archive | 2005

System and method for modulating flow through multiple ports in a proximity head

James P. Garcia; Fred C. Redeker; John M. de Larios

Archive | 2002

Wafer bevel edge cleaning system and apparatus

John M. Boyd; Fred C. Redecker; James P. Garcia

Archive | 2007

MENISCUS PROXIMITY SYSTEM FOR CLEANING SEMICONDUCTOR SUBSTRATE SURFACES

Carl Woods; James P. Garcia; John M. de Larios

Archive | 2006

System processing a substrate using dynamic liquid meniscus

James P. Garcia; John M. de Larios; Michael Ravkin; Fred C. Redeker; Carl Woods

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Collaboration

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Carl Woods

Lam Research

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Fred C. Redeker

Lam Research

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Larios John M. De

Lam Research

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John M. de Larios

Lam Research

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Mike Ravkin

Lam Research

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Afshin Nickhou

Lam Research

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Michael Ravkin

Lam Research

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Fritz C. Redeker

Lam Research

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John M. Boyd

Lam Research

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John Parks

Lam Research

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