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Peter Deufel

Carl Zeiss AG

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Publication

Featured researches published by Peter Deufel.

Archive | 2006

Lithographic apparatus, device manufacturing method and exchangeable optical element

Erik Roelof Loopstra; Adrianus Franciscus Petrus Engelen; Bernardus Antonius Johannes Luttikhuis; Maria Johanna Agnes Rubingh; Johannes Martinus Andreas Hazenberg; Laurentius Catrinus Jorritsma; Johannes Wilhelmus De Klerk; Bernhard Geuppert; Aart Adrianus Van Beuzekom; Petrus Franciscus Wilhelmus Maria Mandigers; Franz Sorg; Peter Deufel; Peter Schaap

Archive | 2008

Method and device for the correction of imaging defects

Franz Sorg; Peter Deufel; Toralf Gruner

Archive | 2009

Method and Device for Replacing Objective Parts

Bernhard Geuppert; Guido Limbach; Harald Woelfle; Peter Deufel

Archive | 2012

OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITHOGRAPHY

Viktor Kulitsky; Bernhard Gellrich; Stefan Xalter; Yim-Bun Patrick Kwan; Peter Deufel; Andreas Wurmbrand

Archive | 2006

Verfahren und Vorrichtung zum Austausch von Objetkivteilen

Peter Deufel; Bernhard Geuppert; Guido Limbach; Harald Wölfle

Archive | 2017

PROJECTION EXPOSURE APPARATUS WITH NEAR-FIELD MANIPULATOR

Peter Deufel; Johannes Lippert; Pascal Marsollek; Jasper Wesselingh; Yim-Bun Patrick Kwan

Archive | 2016

CONNECTION ARRANGEMENT FOR THE NON-POSITIVE CONNECTION OF CERAMIC COMPONENTS

Karsten Siegmanski; Peter Deufel; Viktor Kulytskyy; Stefan Xalter; Bernhard Gellrich

Archive | 2015

Projektionsbelichtungsanlage mit feldnahem manipulator

Peter Deufel; Johannes Lippert; Pascal Marsollek; Jasper Wesselingh; Yim-Bun Patrick Kwan

Archive | 2015

Projection lighting system with near-field manipulator

Peter Deufel; Johannes Lippert; Pascal Marsollek; Jasper Wesselingh; Yim-Bun Patrick Kwan

Archive | 2014

Method for replacing objective parts

Bernhard Geuppert; Guido Limbach; Harald Woelfle; Peter Deufel

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Collaboration

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Bernhard Geuppert

Carl Zeiss AG

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Guido Limbach

Carl Zeiss AG

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Franz Sorg

Carl Zeiss AG

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Yim-Bun Patrick Kwan

Carl Zeiss AG

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Bernhard Gellrich

Carl Zeiss AG

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Harald Wölfle

Carl Zeiss AG

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Jasper Wesselingh

Carl Zeiss AG

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Johannes Lippert

Carl Zeiss AG

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Pascal Marsollek

Carl Zeiss AG

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Stefan Xalter

Carl Zeiss AG

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