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Dive into the research topics where Stephan Kruegel is active.

Publication


Featured researches published by Stephan Kruegel.


Archive | 2001

Field effect transistor with an improved gate contact and method of fabricating the same

Karsten Wieczorek; Rolf Stephan; Manfred Horstmann; Stephan Kruegel


Archive | 2003

Method of forming a metal silicide gate in a standard MOS process sequence

Karsten Wieczorek; Stephan Kruegel; Manfred Horstmann; Thomas Feudel


Archive | 2003

Drain/source extension structure of a field effect transistor including doped high-k sidewall spacers

Thomas Feudel; Manfred Horstmann; Karsten Wieczorek; Stephan Kruegel


Archive | 2005

Technique for forming a substrate having crystalline semiconductor regions of different characteristics

Wolfgang Buchholtz; Stephan Kruegel


Archive | 2003

Method of filling an opening in a material layer with an insulating material

Karsten Wieczorek; Stephan Kruegel; Michael Raab


Archive | 2008

INCREASING ETCH SELECTIVITY DURING THE PATTERNING OF A CONTACT STRUCTURE OF A SEMICONDUCTOR DEVICE

Markus Lenski; Stephan Kruegel; Andreas Gehring


Archive | 2002

Method of forming layers of oxide on a surface of a substrate

Karsten Wieczorek; Falk Graetsch; Stephan Kruegel


Archive | 2003

Methods of forming drain/source extension structures of a field effect transistor using a doped high-k dielectric layer

Thomas Feudel; Manfred Horstmann; Karsten Wieczorek; Stephan Kruegel


Archive | 2001

Field effect transistor with reduced gate delay and method of fabricating the same

Manfred Horstmann; Rolf Stephan; Karsten Wieczorek; Stephan Kruegel


Archive | 2006

TRENCH ISOLATION STRUCTURE FOR A SEMICONDUCTOR DEVICE WITH REDUCED SIDEWALL STRESS AND A METHOD OF MANUFACTURING THE SAME

Klaus Hempel; Stephan Kruegel; Ekkehard Pruefer

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