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Steven Scheer

Tokyo Electron

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Publication

Featured researches published by Steven Scheer.

Archive | 2007

Enhanced process yield using a hot-spot library

Benjamen M. Rathsack; Kathleen Nafus; Steven Scheer

Archive | 2009

Dual tone development processes

Carlos A. Fonseca; Mark H. Somervell; Steven Scheer

Archive | 2008

METHOD FOR CREATING GRAY-SCALE FEATURES FOR DUAL TONE DEVELOPMENT PROCESSES

Carlos A. Fonseca; Mark H. Somervell; Steven Scheer

Archive | 2009

Dual tone development with plural photo-acid generators in lithographic applications

Carlos A. Fonseca; Mark H. Somervell; Steven Scheer; Wallace P. Printz

Archive | 2009

Variable Resist Protecting Groups

Carlos A. Fonseca; Mark H. Somervell; Steven Scheer

Archive | 2009

Flood exposure process for dual tone development in lithographic applications

Carlos A. Fonseca; Mark H. Somervell; Steven Scheer

Archive | 2009

Using Electric-Field Directed Post-Exposure Bake for Double-Patterning (D-P)

Steven Scheer; Mark H. Somervell

Archive | 2007

Methods and heat treatment apparatus for uniformly heating a substrate during a bake process

Steven Scheer; Michael A. Carcasi

Archive | 2008

METHOD OF REAL TIME DYNAMIC CD CONTROL

Steven Scheer

Archive | 2010

METHOD FOR FORMING A SELF-ALIGNED DOUBLE PATTERN

Wallace P. Printz; Steven Scheer

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Collaboration

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Mark H. Somervell

Tokyo Electron

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Carlos A. Fonseca

Tokyo Electron

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Benjamen M. Rathsack

Tokyo Electron

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Wallace P. Printz

Tokyo Electron

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Michael A. Carcasi

Tokyo Electron

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Joshua S. Hooge

Tokyo Electron

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Kathleen Nafus

Tokyo Electron

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Roel Gronheid

Tokyo Electron

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Sophie Bernard

Tokyo Electron

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Benjamin M. Rathsack

Tokyo Electron

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