Walter Pauls | Researchain

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Featured researches published by Walter Pauls.

Archive | 2014

Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element

Boris Bittner; Norbert Wabra; Sonja Schneider; Ricarda Schneider; Hendrik Wagner; Christian Wald; Rumen Iliew; Thomas Schicketanz; Toralf Gruner; Walter Pauls; Holger Schmidt

Archive | 2014

Spiegelanordnung für eine EUV-Projektionsbelichtungsanlage, Verfahren zum Betreiben derselben, sowie EUV-Projektionsbelichtungsanlage

Boris Bittner; Norbert Wabra; Sonja Schneider; Ricarda Schneider; Hendrik Wagner; Rumen Iliew; Walter Pauls

Archive | 2013

Mirror arrangement for an euv projection exposure apparatus, method for operating the same, and euv projection exposure apparatus

Boris Bittner; Norbert Wabra; Sonja Schneider; Ricarda Schneider; Hendrik Wagner; Rumen Iliew; Walter Pauls

Archive | 2014

Method for manufacturing blank for manufacturing mirror, involves determining location-dependent varying distribution of zero crossing temperature in volume of blank, based on three-dimensional profile of temperature distribution

Boris Bittner; Christian Wald; Hendrik Wagner; Norbert Wabra; Steffen Fritzsche; Sonja Schneider; Ricarda Schneider; Holger Schmidt; Walter Pauls; Florian Ahles

Archive | 2016

MIRROR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM AND METHOD FOR PROCESSING A MIRROR

Karl-Heinz Schuster; Boris Bittner; Norbert Wabra; Sonja Schneider; Ricarda Schneider; Hendrik Wagner; Christian Wald; Walter Pauls; Holger Schmidt

Archive | 2013

Arrangement structure for extreme UV (EUV) projection exposure system, has gas flow supply unit that is provided to supply flow of gas through optic element, such that heat exchange takes place between optic element and flow of gas

Boris Bittner; Norbert Wabra; Sonja Schneider; Ricarda Schneider; Hendrik Wagner; Christian Wald; Walter Pauls; Holger Schmidt

Archive | 2013

Projection arrangement for e.g. extreme UV lithography device used for manufacture of e.g. integrated electric circuit, has manipulator which receives signal used for converting transmitted energy into objective form of energy

Boris Bittner; Norbert Wabra; Sonja Schneider; Ricarda Schneider; Hendrik Wagner; Christian Wald; Walter Pauls; Holger Schmidt; Florian Ahles; Steffen Fritzsche

Archive | 2015

Verfahren zum Herstellen eines Rohlings

Boris Bittner; Christian Wald; Hendrik Wagner; Norbert Wabra; Steffen Fritzsche; Sonja Schneider; Ricarda Schneider; Holger Schmidt; Walter Pauls; Florian Ahles

Archive | 2015

Thermisch optimierte obskurationsblenden und projektionsbelichtungsanlage mit derartigen blenden Thermally optimized obskurationsblenden and projection exposure system with such dazzle

Walter Pauls; Hendrik Wagner; Florian Ahles; Steffen Fritzsche; Christian Wald

Archive | 2014

Mikrostrukturierter Sprektralfilter für EUV-Anwendungen

Walter Pauls; Christian Wald; Hendrik Wagner; Boris Bittner; Norbert Wabra; Sonja Schneider; Ricarda Schneider; Holger Schmidt; Alexey Ponomarev; Steffen Fritzsche

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