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William Brearley

IBM

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Publication

Featured researches published by William Brearley.

Archive | 2000

Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization

Kamalesh K. Srivastava; Jonathan H. Griffith; Mary C. Cullinan-scholl; William Brearley; Peter C. Wade

Archive | 2000

Reactive Ion Etching chamber design for flip chip interconnections

Kamalesh K. Srivastava; Peter C. Wade; William Brearley; Jonathan H. Griffith

Archive | 1996

Ball grid array by partitioned lamination process

Roy Yu; William Brearley; Kimberley Ann Kelly; Patrick Michael O'Leary; Arthur G. Merryman; James Wood

Archive | 2007

DRY ETCHBACK OF INTERCONNECT CONTACTS

Theodorus E. Standaert; William Brearley; Stephen E. Greco; Sujatha Sankaran

Archive | 1995

Apparatus for providing solder interconnections to semiconductor and electronic packaging devices

William Brearley; Laertis Economikos; Paul F. Findeis; Kimberley A. Kelly; Bouwe W. Leenstra; Arthur G. Merryman; Eric D. Perfecto; Chandrika Prasad; James Wood; Roy Yu

Archive | 1998

Apparatus and method for use in manufacturing semiconductor devices

William Brearley; Laertis Economikos; Paul F. Findeis; Kimberley A. Kelly; Bouwe W. Leenstra; Arthur G. Merryman; Eric D. Perfecto; Chandrika Prasad; James Wood; Roy Yu

Archive | 1996

Bottom-surface-metallurgy rework process in ceramic modules

Roy Yu; James Wood; Thomas Michael Biruk; Gregory S. Boettcher; William Brearley; Kimberley Ann Kelly; Bouwe W. Leenstra; Arthur G. Merryman

Archive | 2012

Block mask decomposition for mitigating corner rounding

William Brearley; Geng Han; Lars W. Liebmann

Archive | 2006

Trocken-rückätzen von verbindungskontakten

William Brearley; Stephen E. Greco; Sujatha Sankaran; Theodorus E. Standaert

Archive | 2016

OPTICAL RULE CHECKING FOR DETECTING AT RISK STRUCTURES FOR OVERLAY ISSUES

Shayak Banerjee; William Brearley

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Arthur G. Merryman

IBM

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James Wood

IBM

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Roy Yu

IBM

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Bouwe W. Leenstra

IBM

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Stephen E. Greco

IBM

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Sujatha Sankaran

IBM

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Chandrika Prasad

IBM

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Eric D. Perfecto

IBM

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Jonathan H. Griffith

IBM

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Kamalesh K. Srivastava

IBM

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