Evgeni Gousev
IBM
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Publication
Featured researches published by Evgeni Gousev.
Applied Physics Letters | 2002
A. Callegari; Evgeni Gousev; Theodore H. Zabel; Dianne L. Lacey; Michael A. Gribelyuk; P. Jamison
The thermal stability of polycrystalline silicon (poly-Si)/ZrO2 interface was significantly enhanced when the poly-Si was plasma deposited using silane heavily diluted in He. With regard to this process, transmission electron microscopy shows a sharp poly-Si/ZrO2 interface that is stable at 1000u200a°C. When the poly-Si was deposited by chemical vapor deposition using undiluted silane gas, transmission electron microscopy shows strong reactions at the poly-Si/ZrO2 interface when annealed at 1000u200a°C. The increased stability can be attributed to He dilution, which may prevent hydrogen from reducing the metal oxide. Another explanation may be directly related to He-excited plasma, which is known to produce denser and more stable films.
Archive | 2000
Arne W. Ballantine; D. A. Buchanan; E. Cartier; Kevin K. Chan; M. Copel; C. D'Emic; Evgeni Gousev; F. R. McFeely; J. Newbury; Harald F. Okorn-Schmidt; Patrick R. Varekamp; Theodore H. Zabel
Archive | 2004
Nestor A. Bojarczuk; Cyril Cabral; E. Cartier; M. Copel; Martin M. Frank; Evgeni Gousev; Supratik Guha; Rajarao Jammy; Vijay Narayanan; Vamsi Paruchuri
Archive | 2000
Alessandro Callegari; Fuad E. Doany; Evgeni Gousev; Theodore H. Zabel
Archive | 2005
Ricky S. Amos; D. A. Buchanan; Cyril Cabral; Evgeni Gousev; Victor Ku; A. Steegen
Archive | 2003
Arne W. Ballantine; D. A. Buchanan; E. Cartier; Douglas D. Coolbaugh; Evgeni Gousev; Harald F. Okorn-Schmidt
Archive | 2001
Nestor A. Bojarczuk; Kevin K. Chan; C. D'Emic; Evgeni Gousev; Supratik Guha; P. Jamison; Lars-Ake Ragnarsson
Archive | 2004
Martin M. Frank; Evgeni Gousev; E. Cartier
Archive | 2005
Nestor A. Bojarczuk; Cyril Cabral; E. Cartier; Martin M. Frank; Evgeni Gousev; Supratik Guha; P. Jamison; Rajarao Jammy; Vijay Narayanan; Vamsi Paruchuri
Archive | 2008
Wanda Andreoni; Alessandro Callegari; E. Cartier; Alessandro Curioni; C. D'Emic; Evgeni Gousev; Michael A. Gribelyuk; P. Jamison; Rajarao Jammy; Dianne L. Lacey; F. R. McFeely; Vijay Narayanan; Carlo A. Pignedoli; Joseph F. Shepard; Sufi Zafar
